diff --git a/onnxruntime/core/providers/webgpu/nn/instance_norm.cc b/onnxruntime/core/providers/webgpu/nn/instance_norm.cc
index 0cab454a5a530..f3bccec4872fc 100644
--- a/onnxruntime/core/providers/webgpu/nn/instance_norm.cc
+++ b/onnxruntime/core/providers/webgpu/nn/instance_norm.cc
@@ -13,23 +13,25 @@ namespace onnxruntime {
 namespace webgpu {
 
 Status ComputeChannelScaleShiftProgram::GenerateShaderCode(ShaderHelper& shader) const {
-  const auto& input = shader.AddInput("x", ShaderUsage::UseUniform | ShaderUsage::UseIndicesTypeAlias | ShaderUsage::UseElementTypeAlias | ShaderUsage::UseValueTypeAlias | ShaderUsage::UseIndicesTypeAlias);
+  const auto& input = shader.AddInput("x", ShaderUsage::UseUniform | ShaderUsage::UseIndicesTypeAlias);
   const auto& scale = shader.AddInput("scale", ShaderUsage::UseUniform | ShaderUsage::UseIndicesTypeAlias);
   const auto& bias = shader.AddInput("bias", ShaderUsage::UseUniform | ShaderUsage::UseIndicesTypeAlias);
-  const ShaderVariableHelper& output = shader.AddOutput("output", ShaderUsage::UseUniform | ShaderUsage::UseIndicesTypeAlias | ShaderUsage::UseValueTypeAlias);
+  const ShaderVariableHelper& output = shader.AddOutput("output", ShaderUsage::UseUniform | ShaderUsage::UseIndicesTypeAlias | ShaderUsage::UseValueTypeAlias | ShaderUsage::UseElementTypeAlias);
 
-  shader.AdditionalImplementation() << "var<workgroup> workgroup_shared_sum : array<x_value_t, " << workgroup_size_ << ">;\n"
-                                    << "var<workgroup> workgroup_shared_squared_sum : array<x_value_t, " << workgroup_size_ << ">;\n"
+  shader.AdditionalImplementation() << "alias f32_val_t = " << (components_ == 4 ? "vec4<f32>" : (components_ == 2 ? "vec2<f32>" : "f32")) << ";\n"
+                                    << "var<workgroup> workgroup_shared_sum : array<f32_val_t, " << workgroup_size_ << ">;\n"
+                                    << "var<workgroup> workgroup_shared_squared_sum : array<f32_val_t, " << workgroup_size_ << ">;\n"
                                     << "const workgroup_size = " << workgroup_size_ << ";\n";
+
   shader.MainFunctionBody() << "  let batch = workgroup_idx / uniforms.x_shape[1];\n"
                             << "  let channel = workgroup_idx % uniforms.x_shape[1];\n"
                             << "  let hight = uniforms.x_shape[2];\n"
                             << "   // initialize workgroup memory<< \n"
-                            << "  var sum = x_value_t(0);\n"
-                            << "  var squared_sum = x_value_t(0);\n"
+                            << "  var sum = f32_val_t(0);\n"
+                            << "  var squared_sum = f32_val_t(0);\n"
                             << "  for (var h = local_idx; h < hight; h += workgroup_size) {\n"
                             << "    let indices = x_indices_t(batch, channel, h);\n"
-                            << "    let value =" << input.GetByIndices("indices") << ";\n"
+                            << "    let value = f32_val_t(" << input.GetByIndices("indices") << ");\n"
                             << "    sum += value;\n"
                             << "    squared_sum += value * value;\n"
                             << "  }\n"
@@ -44,12 +46,12 @@ Status ComputeChannelScaleShiftProgram::GenerateShaderCode(ShaderHelper& shader)
                             << "    workgroupBarrier();\n"
                             << "  }\n"
                             << "  if (local_idx == 0) {\n"
-                            << "    let sum_final = " << SumVector("workgroup_shared_sum[0]", components_) << " / x_element_t(hight * " << components_ << ");\n"
-                            << "    let squared_sum_final = " << SumVector("workgroup_shared_squared_sum[0]", components_) << " / x_element_t(hight * " << components_ << ");\n"
-                            << "    let inv_std_dev = inverseSqrt(squared_sum_final - sum_final * sum_final + x_element_t(" << std::to_string(epsilon_) << "));\n"
-                            << "    let channel_scale = inv_std_dev * " << scale.GetByOffset("channel") << ";\n"
-                            << "    let channel_shift = " << bias.GetByOffset("channel") << " - sum_final * channel_scale;\n"
-                            << "    " << output.SetByOffset("workgroup_idx", "output_value_t(channel_scale, channel_shift)") << ";\n"
+                            << "    let sum_final = " << SumVector("workgroup_shared_sum[0]", components_) << " / f32(hight * " << components_ << ");\n"
+                            << "    let squared_sum_final = " << SumVector("workgroup_shared_squared_sum[0]", components_) << " / f32(hight * " << components_ << ");\n"
+                            << "    let inv_std_dev = inverseSqrt(squared_sum_final - sum_final * sum_final + f32(" << std::to_string(epsilon_) << "));\n"
+                            << "    let channel_scale = inv_std_dev * f32(" << scale.GetByOffset("channel") << ");\n"
+                            << "    let channel_shift = f32(" << bias.GetByOffset("channel") << ") - sum_final * channel_scale;\n"
+                            << "    " << output.SetByOffset("workgroup_idx", "output_value_t(output_element_t(channel_scale), output_element_t(channel_shift))") << ";\n"
                             << "  }\n";
   return Status::OK();
 }
@@ -110,7 +112,7 @@ Status InstanceNormProgramNHWC::GenerateShaderCode(ShaderHelper& shader) const {
                             << "let input_value = " << input.GetByOffset("global_idx") << ";\n";
   if (components_ > 1) {
     shader.MainFunctionBody() << "for (var i : u32 = 0; i < uniforms.components; i = i + 1) {\n"
-                              << "  let scale_sift =  " << channel_scale_shift.GetByOffset("scale_offset + i") << ";\n"
+                              << "  let scale_sift = " << channel_scale_shift.GetByOffset("uniforms.components * scale_offset + i") << ";\n"
                               << "  scale[i] = input_element_t(scale_sift.x);\n"
                               << "  shift[i] = input_element_t(scale_sift.y);\n"
                               << "}\n";